\u5341\u5927\u54c1\u724c\u6392\u884c\u699c<\/a>\uff0c\u82f1\u7279\u5c14\u8fd8\u5229\u7528\u8584\u819c\u7535\u963b\u7387\uff08thin film resistivity\uff09\u3001\u7a7a\u6c14\u95f4\u9699\uff08airgap\uff09\u6280\u672f\uff0c\u4f7f\u5f97\u901a\u5b54\u5468\u56f4\u4e0d\u518d\u9700\u8981\u6602\u8d35\u7684\u5149\u523b\u7a7a\u6c14\u95f4\u9699\uff0c\u540c\u65f6\u907f\u514d\u4f7f\u7528\u9009\u62e9\u6027\u8680\u523b\u7684\u81ea\u5bf9\u51c6\u901a\u5b54\uff08self-aligned via\uff09\uff0c\u5f53\u4e92\u8fde\u95f4\u8ddd\u5c0f\u4e8e\u7b49\u4e8e25nm\u65f6\uff0c\u91c7\u7528\u51cf\u6210\u6cd5\u948c\u4e92\u8fde\u6280\u672f\u5b9e\u73b0\u7684\u7a7a\u6c14\u95f4\u9699\uff0c\u53ef\u4ee5\u4f7f\u7ebf\u95f4\u7535\u5bb9\u6700\u9ad8\u964d\u4f4e25\uff05\uff0c\u4ee5\u66ff\u4ee3\u94dc\u9576\u5d4c\u5de5\u827a\u3002\u800c\u7ebf\u95f4\u7535\u5bb9\u7684\u964d\u4f4e\u6709\u52a9\u4e8e\u63d0\u5347\u4fe1\u53f7\u4f20\u8f93\u901f\u5ea6\u548c\u964d\u4f4e\u529f\u8017\uff0c\u8fdb\u800c\u6539\u5584\u6574\u4f53\u82af\u7247\u6548\u7387\u3002<\/p>\n
<\/p>\n
\u51cf\u6210\u6cd5\u948c\u4e92\u8fde\u6280\u672f\u4e00\u65b9\u9762\u5e26\u6765\u4e86\u66f4\u9ad8\u7684\u529f\u80fd\u5bc6\u5ea6\uff0c\u4f7f\u5f97\u82af\u7247\u80fd\u591f\u5728\u66f4\u5c0f\u7684\u7a7a\u95f4\u5185\u5b9e\u73b0\u66f4\u590d\u6742\u7684\u529f\u80fd\u3002\u53e6\u4e00\u65b9\u9762\u53ef\u4ee5\u964d\u4f4e\u751f\u4ea7\u5236\u9020\u6210\u672c\uff0c\u4ece\u800c\u4fc3\u8fdb\u672a\u6765\u534a\u5bfc\u4f53\u82af\u7247\u82af\u7247\u6280\u672f\u7684\u53d1\u5c55\u3002<\/p>\n
\u00b7\u9009\u62e9\u6027\u5c42\u8f6c\u79fb\u6280\u672f\uff08SLT\uff09<\/p>\n
<\/p>\n
\u8be5\u6280\u672f\u4e3b\u8981\u9762\u5411\u5f02\u6784\u96c6\u6210\uff0c\u5b83\u901a\u8fc7\u9ad8\u6548\u6574\u5408\u8d85\u8584\u82af\u7c92\uff08chiplet\uff09\uff0c\u5b9e\u73b0\u4e86\u82af\u7247\u7684\u529f\u80fd\u5bc6\u5ea6\u548c\u5c01\u88c5\u541e\u5410\u91cf\u7684\u663e\u8457\u63d0\u5347\u3002\u540c\u65f6\u5b83\u5141\u8bb8\u4ee5\u66f4\u9ad8\u7684\u7075\u6d3b\u6027\u96c6\u6210\u8d85\u8584\u82af\u7c92\uff0c\u4ece\u800c\u663e\u8457\u7f29\u5c0f\u82af\u7247\u5c3a\u5bf8\u3001\u63d0\u9ad8\u7eb5\u6a2a\u6bd4\u3002\u5bf9\u6bd4\u4f20\u7edf\u7684\u82af\u7247\u5230\u6676\u5706\u952e\u5408\uff08chip-to-wafer bonding\uff09\u6280\u672f\uff0c\u9009\u62e9\u6027\u5c42\u8f6c\u79fb\u6280\u672f\uff08SLT\uff09\u5c06\u5e26\u6765\u9ad8\u8fbe100\u500d\u7684\u82af\u7247\u5c01\u88c5\u541e\u5410\u91cf\u63d0\u5347\uff0c\u8d85\u5feb\u901f\u82af\u7247\u95f4\u5c01\u88c5\u5c06\u4e0d\u518d\u662f\u7eb8\u4e0a\u8c08\u5175\u3002<\/p>\n
\u5229\u7528\u8fd9\u9879\u6280\u672f\uff0c\u4ee3\u5de5\u5382\u80fd\u591f\u5236\u9020\u51fa\u9762\u79ef\u4e3a1\u5e73\u65b9\u6beb\u7c73\u3001\u539a\u5ea6\u5c0f\u4e8e\u4eba\u7c7b\u5934\u53d117\u500d\u7684\u82af\u7247\uff0c\u5e76\u80fd\u5728\u51e0\u5206\u949f\u5185\u5b8c\u6210\u8d85\u8fc715000\u4e2a\u82af\u7247\u7684\u5e76\u884c\u6676\u5706\u8f6c\u79fb\u3002\u5b83\u975e\u5e38\u9002\u5408\u9700\u8981\u9ad8\u6027\u80fd\u3001\u9ad8\u96c6\u6210\u5ea6\u548c\u4f4e\u529f\u8017\u7684\u82af\u7247\u5e94\u7528\u573a\u666f\uff0c\u5982AI\uff08\u4eba\u5de5\u667a\u80fd\uff09\u3001HPC\uff08\u9ad8\u6027\u80fd\u8ba1\u7b97\uff09\u3001IoT\uff08\u7269\u8054\u7f51\uff09\u4ee5\u53ca5G\u901a\u4fe1\u7b49\u9886\u57df\u3002<\/p>\n
<\/p>\n
\u00b7\u7845\u57faRibbonFET CMOS\u6676\u4f53\u7ba1\u6280\u672f<\/p>\n
<\/p>\n
\u968f\u7740\u6676\u4f53\u7ba1\u5c3a\u5bf8\u7684\u4e0d\u65ad\u7f29\u5c0f\uff0c\u4f20\u7edf\u7684\u9ccd\u5f0f\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08FinFET\uff09\u6280\u672f\u5df2\u7ecf\u9010\u6e10\u63a5\u8fd1\u5176\u7269\u7406\u6781\u9650\u3002\u4e3a\u4e86\u514b\u670d\u8fd9\u4e00\u6311\u6218\uff0c\u4e1a\u754c\u5f00\u59cb\u63a2\u7d22\u65b0\u7684\u6676\u4f53\u7ba1\u67b6\u6784\uff0c\u5176\u4e2d\u73af\u7ed5\u6805\u6781\u7845\u57faRibbonFET CMOS\u6676\u4f53\u7ba1\u6280\u672f\u5c31\u662f\u5176\u4e2d\u7684\u4e00\u79cd\u91cd\u8981\u65b9\u6848\u3002\u8be5\u6280\u672f\u901a\u8fc7\u8ba9\u6805\u6781\u5168\u9762\u73af\u7ed5\u5e26\u72b6\u7684\u6676\u4f53\u7ba1\u6c9f\u9053\uff0c\u5b9e\u73b0\u4e86\u5bf9\u7535\u6d41\u7684\u66f4\u7cbe\u786e\u63a7\u5236\uff0c\u4ece\u800c\u63d0\u5347\u4e86\u6676\u4f53\u7ba1\u7684\u6027\u80fd\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n
\u82f1\u7279\u5c14\u4ee3\u5de5\u80fd\u591f\u5c06\u73af\u7ed5\u6805\u6781\uff08Gate-All-Around\uff09RibbonFET\u6676\u4f53\u7ba1\u7684\u6805\u6781\u957f\u5ea6\u7f29\u51cf\u52306nm\u3001\u7845\u539a\u5ea6\u7f29\u51cf\u52301.7nm\uff0c\u6709\u6548\u964d\u4f4e\u6c9f\u9053\u539a\u5ea6\u3002<\/p>\n
\u76f8\u8f83\u4e8e\u4f20\u7edf\u7684\u6c34\u5e73\u5806\u53e0\u65b9\u5f0f\uff0cRibbonFET\u6676\u4f53\u7ba1\u7684\u6c9f\u9053\u53ef\u4ee5\u8fdb\u884c\u5782\u76f4\u5806\u53e0\uff0c\u518d\u52a0\u4e0a\u6805\u6781\u957f\u5ea6\u7f29\u77ed\u4ee5\u53ca\u6c9f\u9053\u539a\u5ea6\u964d\u4f4e\uff0c\u6676\u4f53\u7ba1\u7684\u5f00\u5173\u901f\u5ea6\u548c\u6574\u4f53\u6027\u80fd\u63d0\u5347\u90fd\u80fd\u591f\u4ece\u4e2d\u83b7\u76ca\u3002\u82f1\u7279\u5c14\u4e5f\u57286\u7eb3\u7c73\u6805\u6781\u957f\u5ea6\u4e0b\uff0c\u901a\u8fc7\u7845\u6c9f\u9053\u539a\u5ea6\u7f29\u653e\u548c\u6e90\u6781\/\u6f0f\u6781\u7ed3\u8f6e\u5ed3\u5de5\u7a0b\uff0c\u5b9e\u73b0\u4e86\u884c\u4e1a\u9886\u5148\u7684\u77ed\u6c9f\u9053\u6548\u5e94\u3002<\/p>\n
\u00b7\u7528\u4e8e\u5fae\u7f29\u76842D GAA\u6676\u4f53\u7ba1\u7684\u6805\u6c27\u5316\u5c42<\/p>\n
<\/p>\n
<\/p>\n
\u57282D GAA\u6676\u4f53\u7ba1\u65b9\u9762\uff0c\u82f1\u7279\u5c14\u4e5f\u53d6\u5f97\u4e86\u76f8\u5173\u8fdb\u5c55\u30022D GAA\uff08Gate-All-Around\uff0c\u73af\u7ed5\u6805\u6781\uff09\u6676\u4f53\u7ba1\u7684\u6805\u6c27\u5316\u5c42\u662f\u5176\u7ed3\u6784\u4e2d\u7684\u5173\u952e\u7ec4\u6210\u90e8\u5206\uff0c\u5bf9\u4e8e\u6676\u4f53\u7ba1\u7684\u6027\u80fd\u548c\u7a33\u5b9a\u6027\u5177\u6709\u91cd\u8981\u5f71\u54cd\u3002\u6805\u6c27\u5316\u5c42\u4f4d\u4e8e\u6805\u6781\u548c\u6c9f\u9053\u4e4b\u95f4\uff0c\u4e3b\u8981\u4f5c\u7528\u662f\u7edd\u7f18\u548c\u7535\u573a\u63a7\u5236\u3002<\/p>\n
\u82f1\u7279\u5c14\u4ee3\u5de5\u5728\u76f8\u5173\u76842D GAA NMOS\uff08N \u578b\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff09\u548cPMOS\uff08P \u578b\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff09\u6676\u4f53\u7ba1\u5236\u9020\u65b9\u9762\u8fdb\u884c\u4e86\u6df1\u5165\u7814\u7a76\uff0c\u5e76\u5c06\u6676\u4f53\u7ba1\u7684\u6805\u6781\u957f\u5ea6\u5fae\u7f29\u5230\u4e8630nm\uff0c\u6709\u52a9\u4e8e\u8fdb\u4e00\u6b65\u63d0\u5347\u6676\u4f53\u7ba1\u6027\u80fd\u548c\u7a33\u5b9a\u6027\u3002<\/p>\n
\u6b64\u5916\uff0c\u6805\u6c27\u5316\u5c42\u901a\u5e38\u91c7\u7528\u9ad8\u7eaf\u5ea6\u7684\u4e8c\u6c27\u5316\u7845\u6750\u6599\uff0c\u82f1\u7279\u5c14\u5728\u7f29\u51cf\u6805\u6781\u957f\u5ea6\u7684\u540c\u65f6\u4e5f\u57282D TMD\uff08\u8fc7\u6e21\u91d1\u5c5e\u4e8c\u786b\u5316\u7269\uff09\u7814\u7a76\u4e0a\u53d6\u5f97\u4e86\u65b0\u8fdb\u5c55\uff0c\u672a\u6765\u6709\u671b\u5728\u5148\u8fdb\u6676\u4f53\u7ba1\u5de5\u827a\u4e2d\u66ff\u4ee3\u7845\u6750\u6599\u3002<\/p>\n
\u00b7300mm\u6c2e\u5316\u9553\u6280\u672f\u65b0\u8fdb\u5c55<\/p>\n
\u9664\u4e86\u4e0a\u8ff0\u56db\u5927\u6838\u5fc3\u6280\u672f\u4e4b\u5916\uff0c\u82f1\u7279\u5c14\u5728300mm\u6c2e\u5316\u9553\uff08GaN\uff09\u6280\u672f\u65b9\u9762\u4e5f\u8fdb\u884c\u4e86\u5f00\u62d3\u6027\u7814\u7a76\u3002\u4f5c\u4e3a\u65b0\u5174\u7684\u7528\u4e8e\u529f\u7387\u5668\u4ef6\u548c\u5c04\u9891\uff08RF\uff09\u5668\u4ef6\u7684\u6750\u6599\uff0c\u6c2e\u5316\u9553\u76f8\u5bf9\u4e8e\u7845\u800c\u8a00\u6709\u7740\u66f4\u5f3a\u7684\u6027\u80fd\u548c\u66f4\u9ad8\u7684\u7535\u538b\u4e0e\u6e29\u5ea6\u627f\u53d7\u80fd\u529b\uff0c\u5728300\u6beb\u7c73GaN-on-TRSOI\uff08\u5bcc\u9677\u9631\u7edd\u7f18\u4f53\u4e0a\u7845\uff09\u886c\u5e95\uff08substrate\uff09\u4e0a\uff0c\u82f1\u7279\u5c14\u4ee3\u5de5\u5236\u9020\u4e86\u4e1a\u754c\u9886\u5148\u7684\u9ad8\u6027\u80fd\u5fae\u7f29\u589e\u5f3a\u578bGaN MOSHEMT\uff08\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u6676\u4f53\u7ba1\uff09\u3002GaN-on-TRSOI\u7b49\u5de5\u827a\u4e0a\u8f83\u4e3a\u5148\u8fdb\u7684\u886c\u5e95\uff0c\u53ef\u4ee5\u901a\u8fc7\u51cf\u5c11\u4fe1\u53f7\u635f\u5931\uff0c\u63d0\u9ad8\u4fe1\u53f7\u7ebf\u6027\u5ea6\u548c\u57fa\u4e8e\u886c\u5e95\u80cc\u90e8\u5904\u7406\u7684\u5148\u8fdb\u96c6\u6210\u65b9\u6848\uff0c\u4e3a\u529f\u7387\u5668\u4ef6\u548c\u5c04\u9891\u5668\u4ef6\u7b49\u5e94\u7528\u5e26\u6765\u66f4\u5f3a\u7684\u6027\u80fd\u3002<\/p>\n
\u00b7\u7ed3\u8bed<\/p>\n
<\/p>\n
<\/p>\n
\u82f1\u7279\u5c14\u4f5c\u4e3a\u884c\u4e1a\u5f15\u9886\u8005\uff0c\u4e0d\u65ad\u63a8\u8fdb\u534a\u5bfc\u4f53\u8bbe\u8ba1\u4e0e\u5236\u9020\uff0c\u6b64\u6b21\u5c55\u793a\u7684\u6280\u672f\u6210\u679c\u5c55\u793a\u4e86\u5176\u5728\u6ee1\u8db3\u672a\u6765\u8ba1\u7b97\u5e94\u7528\u9700\u6c42\u3001\u63a8\u52a8\u6469\u5c14\u5b9a\u5f8b\u53d1\u5c55\u548c\u534a\u5bfc\u4f53\u884c\u4e1a\u8fdb\u6b65\u65b9\u9762\u7684\u6301\u7eed\u52aa\u529b\uff0c\u4e5f\u4f53\u73b0\u4e86\u5176\u5728\u6280\u672f\u521b\u65b0\u548c\u884c\u4e1a\u53d1\u5c55\u4e2d\u7684\u91cd\u8981\u89d2\u8272\u3002<\/p>\n
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